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 装置概要 

  1. Cs-corrector (2) equipped HR-TEM
      (JEM2100, JEOL, Japan)
  2. TPD
      (type R, Rigaku, Japan)
  3. XRF
      (ZSX PrimusII, Rigaku, Japan)
  4. Miniscope
      (TM-1000, Hitachi, Japan)
  5. EPMA
      (EMPA-1610, Shimadzu, Japan)
  6. HR-SEM
      (JSM-7000F/1V, JEOL, Japan)
  7. SPM
      (AFM,SPM-9500J3, Shimadzu, Japan)
  8. Laser Microscope
      (Keyence, VK-8510, Japan)
  9. XPS
      (Axis-Ultra, Kratos, UK)
  10. FIB
      (Focused ion beam system SMI2050, SII, Japan)
  11. FE-SEM
      (JSM6335FS, JEOL, Japan)
  12. Raman, 785nm
      (inVia Raman microscope, Renishaw, USA)
  13. Tensile strength tester
      (MST-I, Shimadzu, Japan)
  14. Raman, 532nm
      (Kaiser Hololab 5000 series, USA)
  15. Raman Spectroscopy
      (T64000, Horiba Jovin Yvon, Japan)